3/6/2012	9:17:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	9:17:58 AM	Recipe started at 9:17 AM
3/6/2012	9:17:58 AM	Helium valve closed
3/6/2012	9:17:58 AM	H2 valve closed
3/6/2012	9:17:58 AM	BCl3 valve closed
3/6/2012	9:17:58 AM	PH3 valve closed
3/6/2012	9:17:58 AM	SiCl4 pre valve closed
3/6/2012	9:17:58 AM	SiCl4 post valve closed
3/6/2012	9:17:58 AM	Main Vac valve closed
3/6/2012	9:17:58 AM	Bubbler valve closed
3/6/2012	9:17:58 AM	Bypass valve opened
3/6/2012	9:17:58 AM	Helium MFC set to  0.000000
3/6/2012	9:17:58 AM	H2 MFC set to  0.000000
3/6/2012	9:17:58 AM	BCl3 MFC set to  0.000000
3/6/2012	9:17:58 AM	PH3 MFC set to  0.000000
3/6/2012	9:17:58 AM	SiCl4 MFC set to  0.000000
3/6/2012	9:17:58 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:17:58 AM	Tube furnace set to 0
3/6/2012	9:17:58 AM	Helium valve closed
3/6/2012	9:17:58 AM	H2 valve closed
3/6/2012	9:17:58 AM	BCl3 valve closed
3/6/2012	9:17:58 AM	PH3 valve closed
3/6/2012	9:17:58 AM	SiCl4 pre valve closed
3/6/2012	9:17:58 AM	SiCl4 post valve closed
3/6/2012	9:17:58 AM	Main Vac valve closed
3/6/2012	9:17:58 AM	Bubbler valve closed
3/6/2012	9:17:58 AM	Bypass valve opened
3/6/2012	9:17:58 AM	Helium MFC set to  0.000000
3/6/2012	9:17:58 AM	H2 MFC set to  0.000000
3/6/2012	9:17:58 AM	BCl3 MFC set to  0.000000
3/6/2012	9:17:58 AM	PH3 MFC set to  0.000000
3/6/2012	9:17:58 AM	SiCl4 MFC set to  0.000000
3/6/2012	9:17:58 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:17:58 AM	Tube furnace set to 0
3/6/2012	9:18:04 AM	Run aborted at 9:18 AM
3/6/2012	9:18:04 AM	Helium valve closed
3/6/2012	9:18:04 AM	H2 valve closed
3/6/2012	9:18:04 AM	BCl3 valve closed
3/6/2012	9:18:05 AM	PH3 valve closed
3/6/2012	9:18:05 AM	SiCl4 pre valve closed
3/6/2012	9:18:05 AM	SiCl4 post valve closed
3/6/2012	9:18:05 AM	Bypass valve closed
3/6/2012	9:18:05 AM	Main Vac valve closed
3/6/2012	9:18:05 AM	Bubbler valve closed
3/6/2012	9:18:05 AM	Helium MFC set to  0.000000
3/6/2012	9:18:05 AM	H2 MFC set to  0.000000
3/6/2012	9:18:05 AM	BCl3 MFC set to  0.000000
3/6/2012	9:18:05 AM	PH3 MFC set to  0.000000
3/6/2012	9:18:05 AM	SiCl4 MFC set to  0.000000
3/6/2012	9:18:05 AM	Tube furnace set to 0
3/6/2012	9:18:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	9:18:18 AM	Main Vac valve opened
3/6/2012	9:18:27 AM	Tube furnace set to 60
3/6/2012	9:18:44 AM	Main Vac valve closed
3/6/2012	9:19:13 AM	Main Vac valve opened
3/6/2012	9:29:05 AM	Recipe started at 9:29 AM
3/6/2012	9:29:05 AM	Helium valve closed
3/6/2012	9:29:05 AM	H2 valve closed
3/6/2012	9:29:05 AM	BCl3 valve closed
3/6/2012	9:29:05 AM	PH3 valve closed
3/6/2012	9:29:05 AM	SiCl4 pre valve closed
3/6/2012	9:29:05 AM	SiCl4 post valve closed
3/6/2012	9:29:05 AM	Main Vac valve closed
3/6/2012	9:29:05 AM	Bypass valve closed
3/6/2012	9:29:05 AM	Bubbler valve closed
3/6/2012	9:29:05 AM	Helium MFC set to  0.000000
3/6/2012	9:29:05 AM	H2 MFC set to  0.000000
3/6/2012	9:29:05 AM	BCl3 MFC set to  0.000000
3/6/2012	9:29:05 AM	PH3 MFC set to  0.000000
3/6/2012	9:29:05 AM	SiCl4 MFC set to  0.000000
3/6/2012	9:29:05 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:29:05 AM	Tube furnace set to 0
3/6/2012	9:29:08 AM	Helium valve closed
3/6/2012	9:29:08 AM	BCl3 valve closed
3/6/2012	9:29:08 AM	PH3 valve closed
3/6/2012	9:29:08 AM	SiCl4 pre valve closed
3/6/2012	9:29:08 AM	SiCl4 post valve closed
3/6/2012	9:29:08 AM	Main Vac valve closed
3/6/2012	9:29:08 AM	Bypass valve closed
3/6/2012	9:29:08 AM	Bubbler valve closed
3/6/2012	9:29:08 AM	H2 valve opened
3/6/2012	9:29:08 AM	Helium MFC set to  0.000000
3/6/2012	9:29:08 AM	H2 MFC set to  500.000000
3/6/2012	9:29:08 AM	BCl3 MFC set to  0.000000
3/6/2012	9:29:08 AM	PH3 MFC set to  0.000000
3/6/2012	9:29:08 AM	SiCl4 MFC set to  0.000000
3/6/2012	9:29:08 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:29:08 AM	Tube furnace set to 70
3/6/2012	9:30:13 AM	Helium valve closed
3/6/2012	9:30:13 AM	BCl3 valve closed
3/6/2012	9:30:13 AM	PH3 valve closed
3/6/2012	9:30:13 AM	SiCl4 pre valve closed
3/6/2012	9:30:13 AM	SiCl4 post valve closed
3/6/2012	9:30:13 AM	Main Vac valve closed
3/6/2012	9:30:13 AM	Bypass valve closed
3/6/2012	9:30:13 AM	H2 valve opened
3/6/2012	9:30:13 AM	Bubbler valve opened
3/6/2012	9:30:13 AM	Helium MFC set to  0.000000
3/6/2012	9:30:13 AM	H2 MFC set to  500.000000
3/6/2012	9:30:13 AM	BCl3 MFC set to  0.000000
3/6/2012	9:30:13 AM	PH3 MFC set to  0.000000
3/6/2012	9:30:13 AM	SiCl4 MFC set to  0.000000
3/6/2012	9:30:13 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:30:14 AM	Tube furnace set to 70
3/6/2012	9:30:15 AM	Helium valve closed
3/6/2012	9:30:15 AM	BCl3 valve closed
3/6/2012	9:30:15 AM	PH3 valve closed
3/6/2012	9:30:15 AM	SiCl4 pre valve closed
3/6/2012	9:30:15 AM	SiCl4 post valve closed
3/6/2012	9:30:15 AM	Main Vac valve closed
3/6/2012	9:30:15 AM	Bypass valve closed
3/6/2012	9:30:15 AM	H2 valve opened
3/6/2012	9:30:15 AM	Bubbler valve opened
3/6/2012	9:30:15 AM	Helium MFC set to  0.000000
3/6/2012	9:30:15 AM	H2 MFC set to  450.000000
3/6/2012	9:30:15 AM	BCl3 MFC set to  0.000000
3/6/2012	9:30:15 AM	PH3 MFC set to  0.000000
3/6/2012	9:30:15 AM	SiCl4 MFC set to  0.000000
3/6/2012	9:30:15 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:30:15 AM	Tube furnace set to 1000
3/6/2012	9:50:15 AM	Helium valve closed
3/6/2012	9:50:15 AM	PH3 valve closed
3/6/2012	9:50:15 AM	Main Vac valve closed
3/6/2012	9:50:15 AM	Bypass valve closed
3/6/2012	9:50:15 AM	H2 valve opened
3/6/2012	9:50:15 AM	BCl3 valve opened
3/6/2012	9:50:15 AM	SiCl4 pre valve opened
3/6/2012	9:50:15 AM	SiCl4 post valve opened
3/6/2012	9:50:15 AM	Bubbler valve opened
3/6/2012	9:50:15 AM	Helium MFC set to  0.000000
3/6/2012	9:50:15 AM	H2 MFC set to  450.000000
3/6/2012	9:50:15 AM	BCl3 MFC set to  1.500000
3/6/2012	9:50:15 AM	PH3 MFC set to  0.000000
3/6/2012	9:50:15 AM	SiCl4 MFC set to  50.000000
3/6/2012	9:50:15 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:50:15 AM	Tube furnace set to 1000
3/6/2012	10:06:15 AM	Helium valve closed
3/6/2012	10:06:15 AM	BCl3 valve closed
3/6/2012	10:06:15 AM	PH3 valve closed
3/6/2012	10:06:15 AM	SiCl4 pre valve closed
3/6/2012	10:06:15 AM	SiCl4 post valve closed
3/6/2012	10:06:15 AM	Main Vac valve closed
3/6/2012	10:06:15 AM	Bypass valve closed
3/6/2012	10:06:15 AM	H2 valve opened
3/6/2012	10:06:15 AM	Bubbler valve opened
3/6/2012	10:06:15 AM	Helium MFC set to  0.000000
3/6/2012	10:06:15 AM	H2 MFC set to  500.000000
3/6/2012	10:06:15 AM	BCl3 MFC set to  0.000000
3/6/2012	10:06:15 AM	PH3 MFC set to  0.000000
3/6/2012	10:06:15 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:06:15 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:06:15 AM	Tube furnace set to 750
3/6/2012	10:08:15 AM	H2 valve closed
3/6/2012	10:08:15 AM	BCl3 valve closed
3/6/2012	10:08:15 AM	PH3 valve closed
3/6/2012	10:08:15 AM	SiCl4 pre valve closed
3/6/2012	10:08:15 AM	SiCl4 post valve closed
3/6/2012	10:08:15 AM	Main Vac valve closed
3/6/2012	10:08:15 AM	Bypass valve closed
3/6/2012	10:08:15 AM	Helium valve opened
3/6/2012	10:08:15 AM	Bubbler valve opened
3/6/2012	10:08:15 AM	Helium MFC set to  400.000000
3/6/2012	10:08:15 AM	H2 MFC set to  0.000000
3/6/2012	10:08:15 AM	BCl3 MFC set to  0.000000
3/6/2012	10:08:15 AM	PH3 MFC set to  0.000000
3/6/2012	10:08:15 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:08:15 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:08:15 AM	Tube furnace set to 0
3/6/2012	10:33:15 AM	Helium valve closed
3/6/2012	10:33:15 AM	H2 valve closed
3/6/2012	10:33:15 AM	BCl3 valve closed
3/6/2012	10:33:15 AM	PH3 valve closed
3/6/2012	10:33:15 AM	SiCl4 pre valve closed
3/6/2012	10:33:15 AM	SiCl4 post valve closed
3/6/2012	10:33:15 AM	Main Vac valve closed
3/6/2012	10:33:16 AM	Bypass valve closed
3/6/2012	10:33:16 AM	Bubbler valve closed
3/6/2012	10:33:16 AM	Helium MFC set to  0.000000
3/6/2012	10:33:16 AM	H2 MFC set to  0.000000
3/6/2012	10:33:16 AM	BCl3 MFC set to  0.000000
3/6/2012	10:33:16 AM	PH3 MFC set to  0.000000
3/6/2012	10:33:16 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:33:16 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:33:16 AM	Tube furnace set to 50
3/6/2012	10:38:16 AM	Helium valve closed
3/6/2012	10:38:16 AM	H2 valve closed
3/6/2012	10:38:16 AM	BCl3 valve closed
3/6/2012	10:38:16 AM	PH3 valve closed
3/6/2012	10:38:16 AM	SiCl4 pre valve closed
3/6/2012	10:38:16 AM	SiCl4 post valve closed
3/6/2012	10:38:16 AM	Main Vac valve closed
3/6/2012	10:38:16 AM	Bubbler valve closed
3/6/2012	10:38:16 AM	Bypass valve opened
3/6/2012	10:38:16 AM	Helium MFC set to  0.000000
3/6/2012	10:38:16 AM	H2 MFC set to  0.000000
3/6/2012	10:38:16 AM	BCl3 MFC set to  0.000000
3/6/2012	10:38:16 AM	PH3 MFC set to  0.000000
3/6/2012	10:38:16 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:38:16 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:38:16 AM	Tube furnace set to 0
3/6/2012	10:40:32 AM	Run aborted at 10:40 AM
3/6/2012	10:40:32 AM	Helium valve closed
3/6/2012	10:40:32 AM	H2 valve closed
3/6/2012	10:40:32 AM	BCl3 valve closed
3/6/2012	10:40:32 AM	PH3 valve closed
3/6/2012	10:40:32 AM	SiCl4 pre valve closed
3/6/2012	10:40:32 AM	SiCl4 post valve closed
3/6/2012	10:40:32 AM	Bypass valve closed
3/6/2012	10:40:32 AM	Main Vac valve closed
3/6/2012	10:40:32 AM	Bubbler valve closed
3/6/2012	10:40:32 AM	Helium MFC set to  0.000000
3/6/2012	10:40:32 AM	H2 MFC set to  0.000000
3/6/2012	10:40:32 AM	BCl3 MFC set to  0.000000
3/6/2012	10:40:32 AM	PH3 MFC set to  0.000000
3/6/2012	10:40:32 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:40:32 AM	Tube furnace set to 0
3/6/2012	10:40:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2012	10:40:35 AM	Recipe started at 10:40 AM
3/6/2012	10:40:35 AM	Helium valve closed
3/6/2012	10:40:35 AM	H2 valve closed
3/6/2012	10:40:35 AM	BCl3 valve closed
3/6/2012	10:40:35 AM	PH3 valve closed
3/6/2012	10:40:35 AM	SiCl4 pre valve closed
3/6/2012	10:40:35 AM	SiCl4 post valve closed
3/6/2012	10:40:35 AM	Main Vac valve closed
3/6/2012	10:40:35 AM	Bypass valve closed
3/6/2012	10:40:35 AM	Bubbler valve closed
3/6/2012	10:40:35 AM	Helium MFC set to  0.000000
3/6/2012	10:40:35 AM	H2 MFC set to  0.000000
3/6/2012	10:40:35 AM	BCl3 MFC set to  0.000000
3/6/2012	10:40:35 AM	PH3 MFC set to  0.000000
3/6/2012	10:40:35 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:40:35 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:40:35 AM	Tube furnace set to 0
3/6/2012	10:40:38 AM	H2 valve closed
3/6/2012	10:40:38 AM	BCl3 valve closed
3/6/2012	10:40:38 AM	PH3 valve closed
3/6/2012	10:40:38 AM	SiCl4 pre valve closed
3/6/2012	10:40:38 AM	SiCl4 post valve closed
3/6/2012	10:40:38 AM	Main Vac valve closed
3/6/2012	10:40:38 AM	Bypass valve closed
3/6/2012	10:40:38 AM	Bubbler valve closed
3/6/2012	10:40:38 AM	Helium valve opened
3/6/2012	10:40:38 AM	Helium MFC set to  500.000000
3/6/2012	10:40:38 AM	H2 MFC set to  0.000000
3/6/2012	10:40:38 AM	BCl3 MFC set to  0.000000
3/6/2012	10:40:38 AM	PH3 MFC set to  0.000000
3/6/2012	10:40:38 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:40:38 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:40:38 AM	Tube furnace set to 0
3/6/2012	10:41:42 AM	Helium valve closed
3/6/2012	10:41:42 AM	H2 valve closed
3/6/2012	10:41:42 AM	BCl3 valve closed
3/6/2012	10:41:42 AM	PH3 valve closed
3/6/2012	10:41:42 AM	SiCl4 pre valve closed
3/6/2012	10:41:42 AM	SiCl4 post valve closed
3/6/2012	10:41:42 AM	Main Vac valve closed
3/6/2012	10:41:42 AM	Bypass valve closed
3/6/2012	10:41:42 AM	Bubbler valve closed
3/6/2012	10:41:42 AM	Helium MFC set to  0.000000
3/6/2012	10:41:42 AM	H2 MFC set to  0.000000
3/6/2012	10:41:42 AM	BCl3 MFC set to  0.000000
3/6/2012	10:41:42 AM	PH3 MFC set to  0.000000
3/6/2012	10:41:42 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:41:42 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:41:42 AM	Tube furnace set to 0
3/6/2012	10:41:43 AM	Run finished at 10:41 AM
3/6/2012	10:41:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2012	10:43:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	10:43:32 AM	Recipe started at 10:43 AM
3/6/2012	10:43:32 AM	Helium valve closed
3/6/2012	10:43:32 AM	H2 valve closed
3/6/2012	10:43:32 AM	BCl3 valve closed
3/6/2012	10:43:32 AM	PH3 valve closed
3/6/2012	10:43:32 AM	SiCl4 pre valve closed
3/6/2012	10:43:32 AM	SiCl4 post valve closed
3/6/2012	10:43:32 AM	Main Vac valve closed
3/6/2012	10:43:32 AM	Bubbler valve closed
3/6/2012	10:43:32 AM	Bypass valve opened
3/6/2012	10:43:32 AM	Helium MFC set to  0.000000
3/6/2012	10:43:32 AM	H2 MFC set to  0.000000
3/6/2012	10:43:32 AM	BCl3 MFC set to  0.000000
3/6/2012	10:43:32 AM	PH3 MFC set to  0.000000
3/6/2012	10:43:32 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:43:32 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:43:32 AM	Tube furnace set to 0
3/6/2012	10:44:30 AM	Helium valve closed
3/6/2012	10:44:30 AM	H2 valve closed
3/6/2012	10:44:30 AM	BCl3 valve closed
3/6/2012	10:44:30 AM	PH3 valve closed
3/6/2012	10:44:30 AM	SiCl4 pre valve closed
3/6/2012	10:44:30 AM	SiCl4 post valve closed
3/6/2012	10:44:30 AM	Main Vac valve closed
3/6/2012	10:44:30 AM	Bubbler valve closed
3/6/2012	10:44:30 AM	Bypass valve opened
3/6/2012	10:44:30 AM	Helium MFC set to  0.000000
3/6/2012	10:44:30 AM	H2 MFC set to  0.000000
3/6/2012	10:44:30 AM	BCl3 MFC set to  0.000000
3/6/2012	10:44:30 AM	PH3 MFC set to  0.000000
3/6/2012	10:44:30 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:44:30 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:44:30 AM	Tube furnace set to 0
3/6/2012	10:45:30 AM	Helium valve closed
3/6/2012	10:45:30 AM	H2 valve closed
3/6/2012	10:45:30 AM	BCl3 valve closed
3/6/2012	10:45:30 AM	PH3 valve closed
3/6/2012	10:45:30 AM	SiCl4 pre valve closed
3/6/2012	10:45:30 AM	SiCl4 post valve closed
3/6/2012	10:45:30 AM	Bypass valve closed
3/6/2012	10:45:30 AM	Bubbler valve closed
3/6/2012	10:45:30 AM	Main Vac valve opened
3/6/2012	10:45:30 AM	Helium MFC set to  0.000000
3/6/2012	10:45:30 AM	H2 MFC set to  0.000000
3/6/2012	10:45:30 AM	BCl3 MFC set to  0.000000
3/6/2012	10:45:30 AM	PH3 MFC set to  0.000000
3/6/2012	10:45:30 AM	SiCl4 MFC set to  0.000000
3/6/2012	10:45:30 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	10:45:30 AM	Tube furnace set to 0
3/6/2012	10:45:31 AM	Run finished at 10:45 AM
3/6/2012	10:45:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	11:18:16 AM	Helium MFC set to  20.000000
3/6/2012	11:18:17 AM	Helium valve opened
3/6/2012	11:19:02 AM	Helium valve closed
3/6/2012	11:19:02 AM	Helium valve opened
3/6/2012	11:19:03 AM	Helium valve closed
3/6/2012	11:19:05 AM	Helium MFC set to  0.000000
3/6/2012	11:19:34 AM	Main Vac valve closed
3/6/2012	11:19:56 AM	Main Vac valve opened
3/6/2012	11:20:01 AM	Helium MFC set to  20.000000
3/6/2012	11:20:02 AM	Helium valve opened
3/6/2012	11:21:30 AM	Helium valve closed
3/6/2012	11:21:33 AM	Helium MFC set to  0.000000
3/6/2012	11:30:14 AM	Main Vac valve closed
3/6/2012	11:30:58 AM	Main Vac valve opened
3/6/2012	11:32:43 AM	Recipe started at 11:32 AM
3/6/2012	11:32:43 AM	Helium valve closed
3/6/2012	11:32:43 AM	H2 valve closed
3/6/2012	11:32:43 AM	BCl3 valve closed
3/6/2012	11:32:43 AM	PH3 valve closed
3/6/2012	11:32:43 AM	SiCl4 pre valve closed
3/6/2012	11:32:43 AM	SiCl4 post valve closed
3/6/2012	11:32:43 AM	Main Vac valve closed
3/6/2012	11:32:43 AM	Bypass valve closed
3/6/2012	11:32:43 AM	Bubbler valve closed
3/6/2012	11:32:43 AM	Helium MFC set to  0.000000
3/6/2012	11:32:43 AM	H2 MFC set to  0.000000
3/6/2012	11:32:43 AM	BCl3 MFC set to  0.000000
3/6/2012	11:32:43 AM	PH3 MFC set to  0.000000
3/6/2012	11:32:43 AM	SiCl4 MFC set to  0.000000
3/6/2012	11:32:43 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	11:32:44 AM	Tube furnace set to 0
3/6/2012	11:32:47 AM	Helium valve closed
3/6/2012	11:32:47 AM	BCl3 valve closed
3/6/2012	11:32:47 AM	PH3 valve closed
3/6/2012	11:32:47 AM	SiCl4 pre valve closed
3/6/2012	11:32:47 AM	SiCl4 post valve closed
3/6/2012	11:32:47 AM	Main Vac valve closed
3/6/2012	11:32:47 AM	Bypass valve closed
3/6/2012	11:32:47 AM	Bubbler valve closed
3/6/2012	11:32:47 AM	H2 valve opened
3/6/2012	11:32:47 AM	Helium MFC set to  0.000000
3/6/2012	11:32:47 AM	H2 MFC set to  500.000000
3/6/2012	11:32:47 AM	BCl3 MFC set to  0.000000
3/6/2012	11:32:47 AM	PH3 MFC set to  0.000000
3/6/2012	11:32:47 AM	SiCl4 MFC set to  0.000000
3/6/2012	11:32:47 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	11:32:47 AM	Tube furnace set to 70
3/6/2012	11:33:51 AM	Helium valve closed
3/6/2012	11:33:51 AM	BCl3 valve closed
3/6/2012	11:33:51 AM	PH3 valve closed
3/6/2012	11:33:51 AM	SiCl4 pre valve closed
3/6/2012	11:33:51 AM	SiCl4 post valve closed
3/6/2012	11:33:51 AM	Main Vac valve closed
3/6/2012	11:33:51 AM	Bypass valve closed
3/6/2012	11:33:51 AM	H2 valve opened
3/6/2012	11:33:51 AM	Bubbler valve opened
3/6/2012	11:33:51 AM	Helium MFC set to  0.000000
3/6/2012	11:33:51 AM	H2 MFC set to  500.000000
3/6/2012	11:33:51 AM	BCl3 MFC set to  0.000000
3/6/2012	11:33:51 AM	PH3 MFC set to  0.000000
3/6/2012	11:33:51 AM	SiCl4 MFC set to  0.000000
3/6/2012	11:33:51 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	11:33:51 AM	Tube furnace set to 70
3/6/2012	11:33:52 AM	Helium valve closed
3/6/2012	11:33:52 AM	BCl3 valve closed
3/6/2012	11:33:52 AM	PH3 valve closed
3/6/2012	11:33:52 AM	SiCl4 pre valve closed
3/6/2012	11:33:52 AM	SiCl4 post valve closed
3/6/2012	11:33:52 AM	Main Vac valve closed
3/6/2012	11:33:52 AM	Bypass valve closed
3/6/2012	11:33:52 AM	H2 valve opened
3/6/2012	11:33:52 AM	Bubbler valve opened
3/6/2012	11:33:52 AM	Helium MFC set to  0.000000
3/6/2012	11:33:52 AM	H2 MFC set to  450.000000
3/6/2012	11:33:52 AM	BCl3 MFC set to  0.000000
3/6/2012	11:33:52 AM	PH3 MFC set to  0.000000
3/6/2012	11:33:52 AM	SiCl4 MFC set to  0.000000
3/6/2012	11:33:52 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	11:33:52 AM	Tube furnace set to 1000
3/6/2012	11:53:52 AM	Helium valve closed
3/6/2012	11:53:52 AM	PH3 valve closed
3/6/2012	11:53:52 AM	Main Vac valve closed
3/6/2012	11:53:52 AM	Bypass valve closed
3/6/2012	11:53:52 AM	H2 valve opened
3/6/2012	11:53:52 AM	BCl3 valve opened
3/6/2012	11:53:52 AM	SiCl4 pre valve opened
3/6/2012	11:53:52 AM	SiCl4 post valve opened
3/6/2012	11:53:52 AM	Bubbler valve opened
3/6/2012	11:53:52 AM	Helium MFC set to  0.000000
3/6/2012	11:53:52 AM	H2 MFC set to  450.000000
3/6/2012	11:53:52 AM	BCl3 MFC set to  1.500000
3/6/2012	11:53:52 AM	PH3 MFC set to  0.000000
3/6/2012	11:53:52 AM	SiCl4 MFC set to  50.000000
3/6/2012	11:53:52 AM	Bypass solenoid MFC set to  0.000000
3/6/2012	11:53:53 AM	Tube furnace set to 1000
3/6/2012	12:10:53 PM	Helium valve closed
3/6/2012	12:10:53 PM	BCl3 valve closed
3/6/2012	12:10:53 PM	PH3 valve closed
3/6/2012	12:10:53 PM	SiCl4 pre valve closed
3/6/2012	12:10:53 PM	SiCl4 post valve closed
3/6/2012	12:10:53 PM	Main Vac valve closed
3/6/2012	12:10:53 PM	Bypass valve closed
3/6/2012	12:10:53 PM	H2 valve opened
3/6/2012	12:10:53 PM	Bubbler valve opened
3/6/2012	12:10:53 PM	Helium MFC set to  0.000000
3/6/2012	12:10:53 PM	H2 MFC set to  500.000000
3/6/2012	12:10:53 PM	BCl3 MFC set to  0.000000
3/6/2012	12:10:53 PM	PH3 MFC set to  0.000000
3/6/2012	12:10:53 PM	SiCl4 MFC set to  0.000000
3/6/2012	12:10:53 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	12:10:53 PM	Tube furnace set to 750
3/6/2012	12:12:53 PM	H2 valve closed
3/6/2012	12:12:53 PM	BCl3 valve closed
3/6/2012	12:12:53 PM	PH3 valve closed
3/6/2012	12:12:53 PM	SiCl4 pre valve closed
3/6/2012	12:12:53 PM	SiCl4 post valve closed
3/6/2012	12:12:53 PM	Main Vac valve closed
3/6/2012	12:12:53 PM	Bypass valve closed
3/6/2012	12:12:53 PM	Helium valve opened
3/6/2012	12:12:53 PM	Bubbler valve opened
3/6/2012	12:12:53 PM	Helium MFC set to  400.000000
3/6/2012	12:12:53 PM	H2 MFC set to  0.000000
3/6/2012	12:12:53 PM	BCl3 MFC set to  0.000000
3/6/2012	12:12:53 PM	PH3 MFC set to  0.000000
3/6/2012	12:12:53 PM	SiCl4 MFC set to  0.000000
3/6/2012	12:12:53 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	12:12:53 PM	Tube furnace set to 0
3/6/2012	12:37:53 PM	Helium valve closed
3/6/2012	12:37:53 PM	H2 valve closed
3/6/2012	12:37:53 PM	BCl3 valve closed
3/6/2012	12:37:53 PM	PH3 valve closed
3/6/2012	12:37:53 PM	SiCl4 pre valve closed
3/6/2012	12:37:53 PM	SiCl4 post valve closed
3/6/2012	12:37:53 PM	Main Vac valve closed
3/6/2012	12:37:53 PM	Bypass valve closed
3/6/2012	12:37:53 PM	Bubbler valve closed
3/6/2012	12:37:53 PM	Helium MFC set to  0.000000
3/6/2012	12:37:53 PM	H2 MFC set to  0.000000
3/6/2012	12:37:53 PM	BCl3 MFC set to  0.000000
3/6/2012	12:37:53 PM	PH3 MFC set to  0.000000
3/6/2012	12:37:53 PM	SiCl4 MFC set to  0.000000
3/6/2012	12:37:53 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	12:37:53 PM	Tube furnace set to 50
3/6/2012	12:42:53 PM	Helium valve closed
3/6/2012	12:42:53 PM	H2 valve closed
3/6/2012	12:42:53 PM	BCl3 valve closed
3/6/2012	12:42:53 PM	PH3 valve closed
3/6/2012	12:42:53 PM	SiCl4 pre valve closed
3/6/2012	12:42:53 PM	SiCl4 post valve closed
3/6/2012	12:42:53 PM	Main Vac valve closed
3/6/2012	12:42:53 PM	Bubbler valve closed
3/6/2012	12:42:53 PM	Bypass valve opened
3/6/2012	12:42:53 PM	Helium MFC set to  0.000000
3/6/2012	12:42:53 PM	H2 MFC set to  0.000000
3/6/2012	12:42:53 PM	BCl3 MFC set to  0.000000
3/6/2012	12:42:53 PM	PH3 MFC set to  0.000000
3/6/2012	12:42:53 PM	SiCl4 MFC set to  0.000000
3/6/2012	12:42:53 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	12:42:53 PM	Tube furnace set to 0
3/6/2012	12:47:53 PM	Helium valve closed
3/6/2012	12:47:53 PM	H2 valve closed
3/6/2012	12:47:53 PM	BCl3 valve closed
3/6/2012	12:47:53 PM	PH3 valve closed
3/6/2012	12:47:53 PM	SiCl4 pre valve closed
3/6/2012	12:47:53 PM	SiCl4 post valve closed
3/6/2012	12:47:53 PM	Bypass valve closed
3/6/2012	12:47:53 PM	Bubbler valve closed
3/6/2012	12:47:53 PM	Main Vac valve opened
3/6/2012	12:47:53 PM	Helium MFC set to  0.000000
3/6/2012	12:47:53 PM	H2 MFC set to  0.000000
3/6/2012	12:47:53 PM	BCl3 MFC set to  0.000000
3/6/2012	12:47:53 PM	PH3 MFC set to  0.000000
3/6/2012	12:47:53 PM	SiCl4 MFC set to  0.000000
3/6/2012	12:47:53 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	12:47:53 PM	Tube furnace set to 0
3/6/2012	12:47:54 PM	Run finished at 12:47 PM
3/6/2012	1:36:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2012	1:36:38 PM	Recipe started at 1:36 PM
3/6/2012	1:36:38 PM	Helium valve closed
3/6/2012	1:36:38 PM	H2 valve closed
3/6/2012	1:36:38 PM	BCl3 valve closed
3/6/2012	1:36:38 PM	PH3 valve closed
3/6/2012	1:36:38 PM	SiCl4 pre valve closed
3/6/2012	1:36:38 PM	SiCl4 post valve closed
3/6/2012	1:36:38 PM	Main Vac valve closed
3/6/2012	1:36:38 PM	Bypass valve closed
3/6/2012	1:36:38 PM	Bubbler valve closed
3/6/2012	1:36:38 PM	Helium MFC set to  0.000000
3/6/2012	1:36:38 PM	H2 MFC set to  0.000000
3/6/2012	1:36:38 PM	BCl3 MFC set to  0.000000
3/6/2012	1:36:38 PM	PH3 MFC set to  0.000000
3/6/2012	1:36:38 PM	SiCl4 MFC set to  0.000000
3/6/2012	1:36:38 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	1:36:38 PM	Tube furnace set to 0
3/6/2012	1:36:41 PM	H2 valve closed
3/6/2012	1:36:41 PM	BCl3 valve closed
3/6/2012	1:36:41 PM	PH3 valve closed
3/6/2012	1:36:41 PM	SiCl4 pre valve closed
3/6/2012	1:36:41 PM	SiCl4 post valve closed
3/6/2012	1:36:41 PM	Main Vac valve closed
3/6/2012	1:36:41 PM	Bypass valve closed
3/6/2012	1:36:41 PM	Bubbler valve closed
3/6/2012	1:36:41 PM	Helium valve opened
3/6/2012	1:36:41 PM	Helium MFC set to  500.000000
3/6/2012	1:36:41 PM	H2 MFC set to  0.000000
3/6/2012	1:36:41 PM	BCl3 MFC set to  0.000000
3/6/2012	1:36:41 PM	PH3 MFC set to  0.000000
3/6/2012	1:36:41 PM	SiCl4 MFC set to  0.000000
3/6/2012	1:36:41 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	1:36:42 PM	Tube furnace set to 0
3/6/2012	1:37:46 PM	Helium valve closed
3/6/2012	1:37:46 PM	H2 valve closed
3/6/2012	1:37:46 PM	BCl3 valve closed
3/6/2012	1:37:46 PM	PH3 valve closed
3/6/2012	1:37:46 PM	SiCl4 pre valve closed
3/6/2012	1:37:46 PM	SiCl4 post valve closed
3/6/2012	1:37:46 PM	Main Vac valve closed
3/6/2012	1:37:46 PM	Bypass valve closed
3/6/2012	1:37:46 PM	Bubbler valve closed
3/6/2012	1:37:46 PM	Helium MFC set to  0.000000
3/6/2012	1:37:46 PM	H2 MFC set to  0.000000
3/6/2012	1:37:46 PM	BCl3 MFC set to  0.000000
3/6/2012	1:37:46 PM	PH3 MFC set to  0.000000
3/6/2012	1:37:46 PM	SiCl4 MFC set to  0.000000
3/6/2012	1:37:46 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	1:37:46 PM	Tube furnace set to 0
3/6/2012	1:37:47 PM	Run finished at 1:37 PM
3/6/2012	1:37:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2012	1:40:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	1:40:31 PM	Recipe started at 1:40 PM
3/6/2012	1:40:31 PM	Helium valve closed
3/6/2012	1:40:31 PM	H2 valve closed
3/6/2012	1:40:31 PM	BCl3 valve closed
3/6/2012	1:40:31 PM	PH3 valve closed
3/6/2012	1:40:31 PM	SiCl4 pre valve closed
3/6/2012	1:40:31 PM	SiCl4 post valve closed
3/6/2012	1:40:31 PM	Main Vac valve closed
3/6/2012	1:40:31 PM	Bubbler valve closed
3/6/2012	1:40:31 PM	Bypass valve opened
3/6/2012	1:40:31 PM	Helium MFC set to  0.000000
3/6/2012	1:40:31 PM	H2 MFC set to  0.000000
3/6/2012	1:40:31 PM	BCl3 MFC set to  0.000000
3/6/2012	1:40:31 PM	PH3 MFC set to  0.000000
3/6/2012	1:40:31 PM	SiCl4 MFC set to  0.000000
3/6/2012	1:40:31 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	1:40:31 PM	Tube furnace set to 0
3/6/2012	1:41:32 PM	Helium valve closed
3/6/2012	1:41:32 PM	H2 valve closed
3/6/2012	1:41:32 PM	BCl3 valve closed
3/6/2012	1:41:32 PM	PH3 valve closed
3/6/2012	1:41:32 PM	SiCl4 pre valve closed
3/6/2012	1:41:32 PM	SiCl4 post valve closed
3/6/2012	1:41:32 PM	Main Vac valve closed
3/6/2012	1:41:32 PM	Bubbler valve closed
3/6/2012	1:41:32 PM	Bypass valve opened
3/6/2012	1:41:32 PM	Helium MFC set to  0.000000
3/6/2012	1:41:32 PM	H2 MFC set to  0.000000
3/6/2012	1:41:32 PM	BCl3 MFC set to  0.000000
3/6/2012	1:41:32 PM	PH3 MFC set to  0.000000
3/6/2012	1:41:32 PM	SiCl4 MFC set to  0.000000
3/6/2012	1:41:32 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	1:41:32 PM	Tube furnace set to 0
3/6/2012	1:42:32 PM	Helium valve closed
3/6/2012	1:42:32 PM	H2 valve closed
3/6/2012	1:42:32 PM	BCl3 valve closed
3/6/2012	1:42:32 PM	PH3 valve closed
3/6/2012	1:42:32 PM	SiCl4 pre valve closed
3/6/2012	1:42:32 PM	SiCl4 post valve closed
3/6/2012	1:42:32 PM	Bypass valve closed
3/6/2012	1:42:32 PM	Bubbler valve closed
3/6/2012	1:42:32 PM	Main Vac valve opened
3/6/2012	1:42:32 PM	Helium MFC set to  0.000000
3/6/2012	1:42:32 PM	H2 MFC set to  0.000000
3/6/2012	1:42:32 PM	BCl3 MFC set to  0.000000
3/6/2012	1:42:32 PM	PH3 MFC set to  0.000000
3/6/2012	1:42:32 PM	SiCl4 MFC set to  0.000000
3/6/2012	1:42:32 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	1:42:33 PM	Tube furnace set to 0
3/6/2012	1:42:34 PM	Run finished at 1:42 PM
3/6/2012	1:42:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	2:16:27 PM	Helium MFC set to  20.000000
3/6/2012	2:16:32 PM	Helium valve opened
3/6/2012	2:17:31 PM	Helium valve closed
3/6/2012	2:18:58 PM	Main Vac valve closed
3/6/2012	2:19:21 PM	Main Vac valve opened
3/6/2012	2:19:38 PM	Helium valve opened
3/6/2012	2:19:59 PM	Helium valve closed
3/6/2012	2:20:51 PM	Tube furnace set to 50
3/6/2012	2:20:58 PM	Main Vac valve closed
3/6/2012	2:21:34 PM	Main Vac valve opened
3/6/2012	2:21:41 PM	Recipe started at 2:21 PM
3/6/2012	2:21:41 PM	Helium valve closed
3/6/2012	2:21:41 PM	H2 valve closed
3/6/2012	2:21:41 PM	BCl3 valve closed
3/6/2012	2:21:41 PM	PH3 valve closed
3/6/2012	2:21:41 PM	SiCl4 pre valve closed
3/6/2012	2:21:41 PM	SiCl4 post valve closed
3/6/2012	2:21:41 PM	Main Vac valve closed
3/6/2012	2:21:41 PM	Bypass valve closed
3/6/2012	2:21:41 PM	Bubbler valve closed
3/6/2012	2:21:41 PM	Helium MFC set to  0.000000
3/6/2012	2:21:41 PM	H2 MFC set to  0.000000
3/6/2012	2:21:41 PM	BCl3 MFC set to  0.000000
3/6/2012	2:21:41 PM	PH3 MFC set to  0.000000
3/6/2012	2:21:41 PM	SiCl4 MFC set to  0.000000
3/6/2012	2:21:41 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	2:21:41 PM	Tube furnace set to 0
3/6/2012	2:21:44 PM	Helium valve closed
3/6/2012	2:21:44 PM	BCl3 valve closed
3/6/2012	2:21:44 PM	PH3 valve closed
3/6/2012	2:21:44 PM	SiCl4 pre valve closed
3/6/2012	2:21:44 PM	SiCl4 post valve closed
3/6/2012	2:21:44 PM	Main Vac valve closed
3/6/2012	2:21:44 PM	Bypass valve closed
3/6/2012	2:21:44 PM	Bubbler valve closed
3/6/2012	2:21:44 PM	H2 valve opened
3/6/2012	2:21:44 PM	Helium MFC set to  0.000000
3/6/2012	2:21:44 PM	H2 MFC set to  500.000000
3/6/2012	2:21:44 PM	BCl3 MFC set to  0.000000
3/6/2012	2:21:44 PM	PH3 MFC set to  0.000000
3/6/2012	2:21:44 PM	SiCl4 MFC set to  0.000000
3/6/2012	2:21:44 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	2:21:44 PM	Tube furnace set to 70
3/6/2012	2:22:50 PM	Helium valve closed
3/6/2012	2:22:50 PM	BCl3 valve closed
3/6/2012	2:22:50 PM	PH3 valve closed
3/6/2012	2:22:50 PM	SiCl4 pre valve closed
3/6/2012	2:22:50 PM	SiCl4 post valve closed
3/6/2012	2:22:50 PM	Main Vac valve closed
3/6/2012	2:22:50 PM	Bypass valve closed
3/6/2012	2:22:50 PM	H2 valve opened
3/6/2012	2:22:50 PM	Bubbler valve opened
3/6/2012	2:22:50 PM	Helium MFC set to  0.000000
3/6/2012	2:22:50 PM	H2 MFC set to  500.000000
3/6/2012	2:22:50 PM	BCl3 MFC set to  0.000000
3/6/2012	2:22:50 PM	PH3 MFC set to  0.000000
3/6/2012	2:22:50 PM	SiCl4 MFC set to  0.000000
3/6/2012	2:22:50 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	2:22:51 PM	Tube furnace set to 70
3/6/2012	2:22:52 PM	Helium valve closed
3/6/2012	2:22:52 PM	BCl3 valve closed
3/6/2012	2:22:52 PM	PH3 valve closed
3/6/2012	2:22:52 PM	SiCl4 pre valve closed
3/6/2012	2:22:52 PM	SiCl4 post valve closed
3/6/2012	2:22:52 PM	Main Vac valve closed
3/6/2012	2:22:52 PM	Bypass valve closed
3/6/2012	2:22:52 PM	H2 valve opened
3/6/2012	2:22:52 PM	Bubbler valve opened
3/6/2012	2:22:52 PM	Helium MFC set to  0.000000
3/6/2012	2:22:52 PM	H2 MFC set to  450.000000
3/6/2012	2:22:52 PM	BCl3 MFC set to  0.000000
3/6/2012	2:22:52 PM	PH3 MFC set to  0.000000
3/6/2012	2:22:52 PM	SiCl4 MFC set to  0.000000
3/6/2012	2:22:52 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	2:22:52 PM	Tube furnace set to 1000
3/6/2012	2:42:52 PM	Helium valve closed
3/6/2012	2:42:52 PM	PH3 valve closed
3/6/2012	2:42:52 PM	Main Vac valve closed
3/6/2012	2:42:52 PM	Bypass valve closed
3/6/2012	2:42:52 PM	H2 valve opened
3/6/2012	2:42:52 PM	BCl3 valve opened
3/6/2012	2:42:52 PM	SiCl4 pre valve opened
3/6/2012	2:42:52 PM	SiCl4 post valve opened
3/6/2012	2:42:52 PM	Bubbler valve opened
3/6/2012	2:42:52 PM	Helium MFC set to  0.000000
3/6/2012	2:42:52 PM	H2 MFC set to  450.000000
3/6/2012	2:42:52 PM	BCl3 MFC set to  1.500000
3/6/2012	2:42:52 PM	PH3 MFC set to  0.000000
3/6/2012	2:42:52 PM	SiCl4 MFC set to  50.000000
3/6/2012	2:42:52 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	2:42:52 PM	Tube furnace set to 1000
3/6/2012	2:59:52 PM	Helium valve closed
3/6/2012	2:59:52 PM	BCl3 valve closed
3/6/2012	2:59:52 PM	PH3 valve closed
3/6/2012	2:59:52 PM	SiCl4 pre valve closed
3/6/2012	2:59:52 PM	SiCl4 post valve closed
3/6/2012	2:59:52 PM	Main Vac valve closed
3/6/2012	2:59:52 PM	Bypass valve closed
3/6/2012	2:59:52 PM	H2 valve opened
3/6/2012	2:59:52 PM	Bubbler valve opened
3/6/2012	2:59:52 PM	Helium MFC set to  0.000000
3/6/2012	2:59:52 PM	H2 MFC set to  500.000000
3/6/2012	2:59:52 PM	BCl3 MFC set to  0.000000
3/6/2012	2:59:52 PM	PH3 MFC set to  0.000000
3/6/2012	2:59:52 PM	SiCl4 MFC set to  0.000000
3/6/2012	2:59:52 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	2:59:52 PM	Tube furnace set to 750
3/6/2012	3:01:52 PM	H2 valve closed
3/6/2012	3:01:52 PM	BCl3 valve closed
3/6/2012	3:01:52 PM	PH3 valve closed
3/6/2012	3:01:52 PM	SiCl4 pre valve closed
3/6/2012	3:01:52 PM	SiCl4 post valve closed
3/6/2012	3:01:52 PM	Main Vac valve closed
3/6/2012	3:01:52 PM	Bypass valve closed
3/6/2012	3:01:52 PM	Helium valve opened
3/6/2012	3:01:52 PM	Bubbler valve opened
3/6/2012	3:01:52 PM	Helium MFC set to  400.000000
3/6/2012	3:01:52 PM	H2 MFC set to  0.000000
3/6/2012	3:01:52 PM	BCl3 MFC set to  0.000000
3/6/2012	3:01:52 PM	PH3 MFC set to  0.000000
3/6/2012	3:01:52 PM	SiCl4 MFC set to  0.000000
3/6/2012	3:01:52 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	3:01:52 PM	Tube furnace set to 0
3/6/2012	3:26:52 PM	Helium valve closed
3/6/2012	3:26:52 PM	H2 valve closed
3/6/2012	3:26:52 PM	BCl3 valve closed
3/6/2012	3:26:52 PM	PH3 valve closed
3/6/2012	3:26:52 PM	SiCl4 pre valve closed
3/6/2012	3:26:52 PM	SiCl4 post valve closed
3/6/2012	3:26:52 PM	Main Vac valve closed
3/6/2012	3:26:52 PM	Bypass valve closed
3/6/2012	3:26:52 PM	Bubbler valve closed
3/6/2012	3:26:52 PM	Helium MFC set to  0.000000
3/6/2012	3:26:52 PM	H2 MFC set to  0.000000
3/6/2012	3:26:52 PM	BCl3 MFC set to  0.000000
3/6/2012	3:26:52 PM	PH3 MFC set to  0.000000
3/6/2012	3:26:52 PM	SiCl4 MFC set to  0.000000
3/6/2012	3:26:52 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	3:26:53 PM	Tube furnace set to 50
3/6/2012	3:29:36 PM	Run aborted at 3:29 PM
3/6/2012	3:29:36 PM	Helium valve closed
3/6/2012	3:29:36 PM	H2 valve closed
3/6/2012	3:29:36 PM	BCl3 valve closed
3/6/2012	3:29:36 PM	PH3 valve closed
3/6/2012	3:29:36 PM	SiCl4 pre valve closed
3/6/2012	3:29:36 PM	SiCl4 post valve closed
3/6/2012	3:29:36 PM	Bypass valve closed
3/6/2012	3:29:36 PM	Main Vac valve closed
3/6/2012	3:29:36 PM	Bubbler valve closed
3/6/2012	3:29:36 PM	Helium MFC set to  0.000000
3/6/2012	3:29:36 PM	H2 MFC set to  0.000000
3/6/2012	3:29:36 PM	BCl3 MFC set to  0.000000
3/6/2012	3:29:36 PM	PH3 MFC set to  0.000000
3/6/2012	3:29:36 PM	SiCl4 MFC set to  0.000000
3/6/2012	3:29:36 PM	Tube furnace set to 0
3/6/2012	3:35:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	3:35:40 PM	Recipe started at 3:35 PM
3/6/2012	3:35:40 PM	Helium valve closed
3/6/2012	3:35:40 PM	H2 valve closed
3/6/2012	3:35:40 PM	BCl3 valve closed
3/6/2012	3:35:40 PM	PH3 valve closed
3/6/2012	3:35:40 PM	SiCl4 pre valve closed
3/6/2012	3:35:40 PM	SiCl4 post valve closed
3/6/2012	3:35:40 PM	Main Vac valve closed
3/6/2012	3:35:40 PM	Bubbler valve closed
3/6/2012	3:35:40 PM	Bypass valve opened
3/6/2012	3:35:40 PM	Helium MFC set to  0.000000
3/6/2012	3:35:40 PM	H2 MFC set to  0.000000
3/6/2012	3:35:40 PM	BCl3 MFC set to  0.000000
3/6/2012	3:35:40 PM	PH3 MFC set to  0.000000
3/6/2012	3:35:40 PM	SiCl4 MFC set to  0.000000
3/6/2012	3:35:40 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	3:35:41 PM	Tube furnace set to 0
3/6/2012	3:36:40 PM	Helium valve closed
3/6/2012	3:36:40 PM	H2 valve closed
3/6/2012	3:36:40 PM	BCl3 valve closed
3/6/2012	3:36:40 PM	PH3 valve closed
3/6/2012	3:36:40 PM	SiCl4 pre valve closed
3/6/2012	3:36:40 PM	SiCl4 post valve closed
3/6/2012	3:36:40 PM	Main Vac valve closed
3/6/2012	3:36:40 PM	Bubbler valve closed
3/6/2012	3:36:40 PM	Bypass valve opened
3/6/2012	3:36:40 PM	Helium MFC set to  0.000000
3/6/2012	3:36:40 PM	H2 MFC set to  0.000000
3/6/2012	3:36:40 PM	BCl3 MFC set to  0.000000
3/6/2012	3:36:40 PM	PH3 MFC set to  0.000000
3/6/2012	3:36:40 PM	SiCl4 MFC set to  0.000000
3/6/2012	3:36:40 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	3:36:40 PM	Tube furnace set to 0
3/6/2012	3:37:40 PM	Helium valve closed
3/6/2012	3:37:40 PM	H2 valve closed
3/6/2012	3:37:40 PM	BCl3 valve closed
3/6/2012	3:37:40 PM	PH3 valve closed
3/6/2012	3:37:40 PM	SiCl4 pre valve closed
3/6/2012	3:37:40 PM	SiCl4 post valve closed
3/6/2012	3:37:40 PM	Bypass valve closed
3/6/2012	3:37:40 PM	Bubbler valve closed
3/6/2012	3:37:40 PM	Main Vac valve opened
3/6/2012	3:37:40 PM	Helium MFC set to  0.000000
3/6/2012	3:37:40 PM	H2 MFC set to  0.000000
3/6/2012	3:37:40 PM	BCl3 MFC set to  0.000000
3/6/2012	3:37:40 PM	PH3 MFC set to  0.000000
3/6/2012	3:37:40 PM	SiCl4 MFC set to  0.000000
3/6/2012	3:37:40 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	3:37:40 PM	Tube furnace set to 0
3/6/2012	3:37:41 PM	Run finished at 3:37 PM
3/6/2012	3:37:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	6:48:24 PM	Tube furnace set to 50
3/6/2012	6:48:35 PM	Main Vac valve closed
3/6/2012	6:49:13 PM	Main Vac valve opened
3/6/2012	6:50:38 PM	Recipe started at 6:50 PM
3/6/2012	6:50:38 PM	Helium valve closed
3/6/2012	6:50:38 PM	H2 valve closed
3/6/2012	6:50:38 PM	BCl3 valve closed
3/6/2012	6:50:38 PM	PH3 valve closed
3/6/2012	6:50:38 PM	SiCl4 pre valve closed
3/6/2012	6:50:38 PM	SiCl4 post valve closed
3/6/2012	6:50:38 PM	Main Vac valve closed
3/6/2012	6:50:38 PM	Bypass valve closed
3/6/2012	6:50:38 PM	Bubbler valve closed
3/6/2012	6:50:38 PM	Helium MFC set to  0.000000
3/6/2012	6:50:38 PM	H2 MFC set to  0.000000
3/6/2012	6:50:38 PM	BCl3 MFC set to  0.000000
3/6/2012	6:50:38 PM	PH3 MFC set to  0.000000
3/6/2012	6:50:38 PM	SiCl4 MFC set to  0.000000
3/6/2012	6:50:38 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	6:50:38 PM	Tube furnace set to 0
3/6/2012	6:50:41 PM	Helium valve closed
3/6/2012	6:50:41 PM	BCl3 valve closed
3/6/2012	6:50:41 PM	PH3 valve closed
3/6/2012	6:50:41 PM	SiCl4 pre valve closed
3/6/2012	6:50:41 PM	SiCl4 post valve closed
3/6/2012	6:50:41 PM	Main Vac valve closed
3/6/2012	6:50:41 PM	Bypass valve closed
3/6/2012	6:50:41 PM	Bubbler valve closed
3/6/2012	6:50:41 PM	H2 valve opened
3/6/2012	6:50:41 PM	Helium MFC set to  0.000000
3/6/2012	6:50:41 PM	H2 MFC set to  500.000000
3/6/2012	6:50:41 PM	BCl3 MFC set to  0.000000
3/6/2012	6:50:41 PM	PH3 MFC set to  0.000000
3/6/2012	6:50:41 PM	SiCl4 MFC set to  0.000000
3/6/2012	6:50:41 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	6:50:42 PM	Tube furnace set to 70
3/6/2012	6:51:49 PM	Helium valve closed
3/6/2012	6:51:49 PM	BCl3 valve closed
3/6/2012	6:51:49 PM	PH3 valve closed
3/6/2012	6:51:49 PM	SiCl4 pre valve closed
3/6/2012	6:51:49 PM	SiCl4 post valve closed
3/6/2012	6:51:49 PM	Main Vac valve closed
3/6/2012	6:51:49 PM	Bypass valve closed
3/6/2012	6:51:49 PM	H2 valve opened
3/6/2012	6:51:49 PM	Bubbler valve opened
3/6/2012	6:51:49 PM	Helium MFC set to  0.000000
3/6/2012	6:51:49 PM	H2 MFC set to  500.000000
3/6/2012	6:51:49 PM	BCl3 MFC set to  0.000000
3/6/2012	6:51:49 PM	PH3 MFC set to  0.000000
3/6/2012	6:51:49 PM	SiCl4 MFC set to  0.000000
3/6/2012	6:51:49 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	6:51:49 PM	Tube furnace set to 70
3/6/2012	6:51:50 PM	Helium valve closed
3/6/2012	6:51:50 PM	BCl3 valve closed
3/6/2012	6:51:50 PM	PH3 valve closed
3/6/2012	6:51:50 PM	SiCl4 pre valve closed
3/6/2012	6:51:50 PM	SiCl4 post valve closed
3/6/2012	6:51:50 PM	Main Vac valve closed
3/6/2012	6:51:50 PM	Bypass valve closed
3/6/2012	6:51:50 PM	H2 valve opened
3/6/2012	6:51:50 PM	Bubbler valve opened
3/6/2012	6:51:50 PM	Helium MFC set to  0.000000
3/6/2012	6:51:50 PM	H2 MFC set to  450.000000
3/6/2012	6:51:50 PM	BCl3 MFC set to  0.000000
3/6/2012	6:51:50 PM	PH3 MFC set to  0.000000
3/6/2012	6:51:50 PM	SiCl4 MFC set to  0.000000
3/6/2012	6:51:50 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	6:51:50 PM	Tube furnace set to 1000
3/6/2012	7:12:50 PM	Helium valve closed
3/6/2012	7:12:50 PM	PH3 valve closed
3/6/2012	7:12:50 PM	Main Vac valve closed
3/6/2012	7:12:50 PM	Bypass valve closed
3/6/2012	7:12:50 PM	H2 valve opened
3/6/2012	7:12:50 PM	BCl3 valve opened
3/6/2012	7:12:50 PM	SiCl4 pre valve opened
3/6/2012	7:12:50 PM	SiCl4 post valve opened
3/6/2012	7:12:50 PM	Bubbler valve opened
3/6/2012	7:12:50 PM	Helium MFC set to  0.000000
3/6/2012	7:12:50 PM	H2 MFC set to  450.000000
3/6/2012	7:12:50 PM	BCl3 MFC set to  1.000000
3/6/2012	7:12:50 PM	PH3 MFC set to  0.000000
3/6/2012	7:12:50 PM	SiCl4 MFC set to  50.000000
3/6/2012	7:12:50 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	7:12:50 PM	Tube furnace set to 1000
3/6/2012	7:29:50 PM	Helium valve closed
3/6/2012	7:29:50 PM	BCl3 valve closed
3/6/2012	7:29:50 PM	PH3 valve closed
3/6/2012	7:29:50 PM	SiCl4 pre valve closed
3/6/2012	7:29:50 PM	SiCl4 post valve closed
3/6/2012	7:29:50 PM	Main Vac valve closed
3/6/2012	7:29:50 PM	Bypass valve closed
3/6/2012	7:29:50 PM	H2 valve opened
3/6/2012	7:29:50 PM	Bubbler valve opened
3/6/2012	7:29:50 PM	Helium MFC set to  0.000000
3/6/2012	7:29:50 PM	H2 MFC set to  500.000000
3/6/2012	7:29:50 PM	BCl3 MFC set to  0.000000
3/6/2012	7:29:50 PM	PH3 MFC set to  0.000000
3/6/2012	7:29:50 PM	SiCl4 MFC set to  0.000000
3/6/2012	7:29:50 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	7:29:50 PM	Tube furnace set to 750
3/6/2012	7:31:50 PM	H2 valve closed
3/6/2012	7:31:50 PM	BCl3 valve closed
3/6/2012	7:31:50 PM	PH3 valve closed
3/6/2012	7:31:50 PM	SiCl4 pre valve closed
3/6/2012	7:31:50 PM	SiCl4 post valve closed
3/6/2012	7:31:50 PM	Main Vac valve closed
3/6/2012	7:31:50 PM	Bypass valve closed
3/6/2012	7:31:51 PM	Helium valve opened
3/6/2012	7:31:51 PM	Bubbler valve opened
3/6/2012	7:31:51 PM	Helium MFC set to  400.000000
3/6/2012	7:31:51 PM	H2 MFC set to  0.000000
3/6/2012	7:31:51 PM	BCl3 MFC set to  0.000000
3/6/2012	7:31:51 PM	PH3 MFC set to  0.000000
3/6/2012	7:31:51 PM	SiCl4 MFC set to  0.000000
3/6/2012	7:31:51 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	7:31:51 PM	Tube furnace set to 0
3/6/2012	8:01:51 PM	Helium valve closed
3/6/2012	8:01:51 PM	H2 valve closed
3/6/2012	8:01:51 PM	BCl3 valve closed
3/6/2012	8:01:51 PM	PH3 valve closed
3/6/2012	8:01:51 PM	SiCl4 pre valve closed
3/6/2012	8:01:51 PM	SiCl4 post valve closed
3/6/2012	8:01:51 PM	Main Vac valve closed
3/6/2012	8:01:51 PM	Bypass valve closed
3/6/2012	8:01:51 PM	Bubbler valve closed
3/6/2012	8:01:51 PM	Helium MFC set to  0.000000
3/6/2012	8:01:51 PM	H2 MFC set to  0.000000
3/6/2012	8:01:51 PM	BCl3 MFC set to  0.000000
3/6/2012	8:01:51 PM	PH3 MFC set to  0.000000
3/6/2012	8:01:51 PM	SiCl4 MFC set to  0.000000
3/6/2012	8:01:51 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	8:01:51 PM	Tube furnace set to 50
3/6/2012	8:06:51 PM	Helium valve closed
3/6/2012	8:06:51 PM	H2 valve closed
3/6/2012	8:06:51 PM	BCl3 valve closed
3/6/2012	8:06:51 PM	PH3 valve closed
3/6/2012	8:06:51 PM	SiCl4 pre valve closed
3/6/2012	8:06:51 PM	SiCl4 post valve closed
3/6/2012	8:06:51 PM	Main Vac valve closed
3/6/2012	8:06:51 PM	Bubbler valve closed
3/6/2012	8:06:51 PM	Bypass valve opened
3/6/2012	8:06:51 PM	Helium MFC set to  0.000000
3/6/2012	8:06:51 PM	H2 MFC set to  0.000000
3/6/2012	8:06:51 PM	BCl3 MFC set to  0.000000
3/6/2012	8:06:51 PM	PH3 MFC set to  0.000000
3/6/2012	8:06:51 PM	SiCl4 MFC set to  0.000000
3/6/2012	8:06:51 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	8:06:51 PM	Tube furnace set to 0
3/6/2012	8:11:51 PM	Helium valve closed
3/6/2012	8:11:51 PM	H2 valve closed
3/6/2012	8:11:51 PM	BCl3 valve closed
3/6/2012	8:11:51 PM	PH3 valve closed
3/6/2012	8:11:51 PM	SiCl4 pre valve closed
3/6/2012	8:11:51 PM	SiCl4 post valve closed
3/6/2012	8:11:51 PM	Bypass valve closed
3/6/2012	8:11:51 PM	Bubbler valve closed
3/6/2012	8:11:51 PM	Main Vac valve opened
3/6/2012	8:11:51 PM	Helium MFC set to  0.000000
3/6/2012	8:11:51 PM	H2 MFC set to  0.000000
3/6/2012	8:11:51 PM	BCl3 MFC set to  0.000000
3/6/2012	8:11:51 PM	PH3 MFC set to  0.000000
3/6/2012	8:11:51 PM	SiCl4 MFC set to  0.000000
3/6/2012	8:11:51 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	8:11:51 PM	Tube furnace set to 0
3/6/2012	8:11:52 PM	Run finished at 8:11 PM
3/6/2012	9:04:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2012	9:04:22 PM	Recipe started at 9:04 PM
3/6/2012	9:04:22 PM	Helium valve closed
3/6/2012	9:04:22 PM	H2 valve closed
3/6/2012	9:04:22 PM	BCl3 valve closed
3/6/2012	9:04:22 PM	PH3 valve closed
3/6/2012	9:04:22 PM	SiCl4 pre valve closed
3/6/2012	9:04:22 PM	SiCl4 post valve closed
3/6/2012	9:04:22 PM	Main Vac valve closed
3/6/2012	9:04:22 PM	Bypass valve closed
3/6/2012	9:04:22 PM	Bubbler valve closed
3/6/2012	9:04:22 PM	Helium MFC set to  0.000000
3/6/2012	9:04:22 PM	H2 MFC set to  0.000000
3/6/2012	9:04:22 PM	BCl3 MFC set to  0.000000
3/6/2012	9:04:22 PM	PH3 MFC set to  0.000000
3/6/2012	9:04:22 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:04:22 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:04:22 PM	Tube furnace set to 0
3/6/2012	9:04:25 PM	H2 valve closed
3/6/2012	9:04:25 PM	BCl3 valve closed
3/6/2012	9:04:25 PM	PH3 valve closed
3/6/2012	9:04:25 PM	SiCl4 pre valve closed
3/6/2012	9:04:25 PM	SiCl4 post valve closed
3/6/2012	9:04:25 PM	Main Vac valve closed
3/6/2012	9:04:25 PM	Bypass valve closed
3/6/2012	9:04:25 PM	Bubbler valve closed
3/6/2012	9:04:25 PM	Helium valve opened
3/6/2012	9:04:25 PM	Helium MFC set to  500.000000
3/6/2012	9:04:25 PM	H2 MFC set to  0.000000
3/6/2012	9:04:25 PM	BCl3 MFC set to  0.000000
3/6/2012	9:04:25 PM	PH3 MFC set to  0.000000
3/6/2012	9:04:25 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:04:25 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:04:25 PM	Tube furnace set to 0
3/6/2012	9:05:26 PM	Helium valve closed
3/6/2012	9:05:26 PM	H2 valve closed
3/6/2012	9:05:26 PM	BCl3 valve closed
3/6/2012	9:05:26 PM	PH3 valve closed
3/6/2012	9:05:26 PM	SiCl4 pre valve closed
3/6/2012	9:05:26 PM	SiCl4 post valve closed
3/6/2012	9:05:26 PM	Main Vac valve closed
3/6/2012	9:05:26 PM	Bypass valve closed
3/6/2012	9:05:26 PM	Bubbler valve closed
3/6/2012	9:05:26 PM	Helium MFC set to  0.000000
3/6/2012	9:05:26 PM	H2 MFC set to  0.000000
3/6/2012	9:05:26 PM	BCl3 MFC set to  0.000000
3/6/2012	9:05:26 PM	PH3 MFC set to  0.000000
3/6/2012	9:05:26 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:05:26 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:05:26 PM	Tube furnace set to 0
3/6/2012	9:05:27 PM	Run finished at 9:05 PM
3/6/2012	9:05:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/6/2012	9:11:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	9:11:04 PM	Recipe started at 9:11 PM
3/6/2012	9:11:04 PM	Helium valve closed
3/6/2012	9:11:04 PM	H2 valve closed
3/6/2012	9:11:04 PM	BCl3 valve closed
3/6/2012	9:11:04 PM	PH3 valve closed
3/6/2012	9:11:04 PM	SiCl4 pre valve closed
3/6/2012	9:11:04 PM	SiCl4 post valve closed
3/6/2012	9:11:04 PM	Main Vac valve closed
3/6/2012	9:11:04 PM	Bubbler valve closed
3/6/2012	9:11:04 PM	Bypass valve opened
3/6/2012	9:11:04 PM	Helium MFC set to  0.000000
3/6/2012	9:11:04 PM	H2 MFC set to  0.000000
3/6/2012	9:11:04 PM	BCl3 MFC set to  0.000000
3/6/2012	9:11:04 PM	PH3 MFC set to  0.000000
3/6/2012	9:11:04 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:11:04 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:11:04 PM	Tube furnace set to 0
3/6/2012	9:11:57 PM	Run aborted at 9:11 PM
3/6/2012	9:11:57 PM	Helium valve closed
3/6/2012	9:11:57 PM	H2 valve closed
3/6/2012	9:11:57 PM	BCl3 valve closed
3/6/2012	9:11:57 PM	PH3 valve closed
3/6/2012	9:11:57 PM	SiCl4 pre valve closed
3/6/2012	9:11:57 PM	SiCl4 post valve closed
3/6/2012	9:11:57 PM	Bypass valve closed
3/6/2012	9:11:57 PM	Main Vac valve closed
3/6/2012	9:11:57 PM	Bubbler valve closed
3/6/2012	9:11:57 PM	Helium MFC set to  0.000000
3/6/2012	9:11:57 PM	H2 MFC set to  0.000000
3/6/2012	9:11:57 PM	BCl3 MFC set to  0.000000
3/6/2012	9:11:57 PM	PH3 MFC set to  0.000000
3/6/2012	9:11:57 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:11:58 PM	Tube furnace set to 0
3/6/2012	9:11:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	9:14:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	9:14:06 PM	Recipe started at 9:14 PM
3/6/2012	9:14:06 PM	Helium valve closed
3/6/2012	9:14:06 PM	H2 valve closed
3/6/2012	9:14:06 PM	BCl3 valve closed
3/6/2012	9:14:06 PM	PH3 valve closed
3/6/2012	9:14:06 PM	SiCl4 pre valve closed
3/6/2012	9:14:06 PM	SiCl4 post valve closed
3/6/2012	9:14:06 PM	Main Vac valve closed
3/6/2012	9:14:06 PM	Bubbler valve closed
3/6/2012	9:14:06 PM	Bypass valve opened
3/6/2012	9:14:06 PM	Helium MFC set to  0.000000
3/6/2012	9:14:06 PM	H2 MFC set to  0.000000
3/6/2012	9:14:06 PM	BCl3 MFC set to  0.000000
3/6/2012	9:14:06 PM	PH3 MFC set to  0.000000
3/6/2012	9:14:06 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:14:06 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:14:06 PM	Tube furnace set to 0
3/6/2012	9:14:24 PM	Run aborted at 9:14 PM
3/6/2012	9:14:24 PM	Helium valve closed
3/6/2012	9:14:24 PM	H2 valve closed
3/6/2012	9:14:24 PM	BCl3 valve closed
3/6/2012	9:14:24 PM	PH3 valve closed
3/6/2012	9:14:24 PM	SiCl4 pre valve closed
3/6/2012	9:14:24 PM	SiCl4 post valve closed
3/6/2012	9:14:24 PM	Bypass valve closed
3/6/2012	9:14:24 PM	Main Vac valve closed
3/6/2012	9:14:24 PM	Bubbler valve closed
3/6/2012	9:14:24 PM	Helium MFC set to  0.000000
3/6/2012	9:14:24 PM	H2 MFC set to  0.000000
3/6/2012	9:14:24 PM	BCl3 MFC set to  0.000000
3/6/2012	9:14:24 PM	PH3 MFC set to  0.000000
3/6/2012	9:14:24 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:14:24 PM	Tube furnace set to 0
3/6/2012	9:14:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	9:15:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	9:15:47 PM	Recipe started at 9:15 PM
3/6/2012	9:15:47 PM	Helium valve closed
3/6/2012	9:15:47 PM	H2 valve closed
3/6/2012	9:15:47 PM	BCl3 valve closed
3/6/2012	9:15:47 PM	PH3 valve closed
3/6/2012	9:15:47 PM	SiCl4 pre valve closed
3/6/2012	9:15:47 PM	SiCl4 post valve closed
3/6/2012	9:15:47 PM	Main Vac valve closed
3/6/2012	9:15:47 PM	Bubbler valve closed
3/6/2012	9:15:47 PM	Bypass valve opened
3/6/2012	9:15:47 PM	Helium MFC set to  0.000000
3/6/2012	9:15:47 PM	H2 MFC set to  0.000000
3/6/2012	9:15:47 PM	BCl3 MFC set to  0.000000
3/6/2012	9:15:47 PM	PH3 MFC set to  0.000000
3/6/2012	9:15:47 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:15:47 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:15:47 PM	Tube furnace set to 0
3/6/2012	9:15:52 PM	Run aborted at 9:15 PM
3/6/2012	9:15:52 PM	Helium valve closed
3/6/2012	9:15:52 PM	H2 valve closed
3/6/2012	9:15:52 PM	BCl3 valve closed
3/6/2012	9:15:52 PM	PH3 valve closed
3/6/2012	9:15:52 PM	SiCl4 pre valve closed
3/6/2012	9:15:52 PM	SiCl4 post valve closed
3/6/2012	9:15:52 PM	Bypass valve closed
3/6/2012	9:15:52 PM	Main Vac valve closed
3/6/2012	9:15:52 PM	Bubbler valve closed
3/6/2012	9:15:52 PM	Helium MFC set to  0.000000
3/6/2012	9:15:52 PM	H2 MFC set to  0.000000
3/6/2012	9:15:52 PM	BCl3 MFC set to  0.000000
3/6/2012	9:15:52 PM	PH3 MFC set to  0.000000
3/6/2012	9:15:52 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:15:53 PM	Tube furnace set to 0
3/6/2012	9:15:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	9:21:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/6/2012	9:21:20 PM	Recipe started at 9:21 PM
3/6/2012	9:21:20 PM	Helium valve closed
3/6/2012	9:21:20 PM	H2 valve closed
3/6/2012	9:21:20 PM	BCl3 valve closed
3/6/2012	9:21:20 PM	PH3 valve closed
3/6/2012	9:21:20 PM	SiCl4 pre valve closed
3/6/2012	9:21:20 PM	SiCl4 post valve closed
3/6/2012	9:21:20 PM	Main Vac valve closed
3/6/2012	9:21:20 PM	Bubbler valve closed
3/6/2012	9:21:20 PM	Bypass valve opened
3/6/2012	9:21:20 PM	Helium MFC set to  0.000000
3/6/2012	9:21:20 PM	H2 MFC set to  0.000000
3/6/2012	9:21:20 PM	BCl3 MFC set to  0.000000
3/6/2012	9:21:20 PM	PH3 MFC set to  0.000000
3/6/2012	9:21:20 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:21:20 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:21:20 PM	Tube furnace set to 0
3/6/2012	9:22:34 PM	Helium valve closed
3/6/2012	9:22:34 PM	H2 valve closed
3/6/2012	9:22:34 PM	BCl3 valve closed
3/6/2012	9:22:34 PM	PH3 valve closed
3/6/2012	9:22:34 PM	SiCl4 pre valve closed
3/6/2012	9:22:34 PM	SiCl4 post valve closed
3/6/2012	9:22:34 PM	Main Vac valve closed
3/6/2012	9:22:34 PM	Bubbler valve closed
3/6/2012	9:22:34 PM	Bypass valve opened
3/6/2012	9:22:34 PM	Helium MFC set to  0.000000
3/6/2012	9:22:34 PM	H2 MFC set to  0.000000
3/6/2012	9:22:34 PM	BCl3 MFC set to  0.000000
3/6/2012	9:22:34 PM	PH3 MFC set to  0.000000
3/6/2012	9:22:34 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:22:34 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:22:34 PM	Tube furnace set to 0
3/6/2012	9:23:34 PM	Helium valve closed
3/6/2012	9:23:34 PM	H2 valve closed
3/6/2012	9:23:34 PM	BCl3 valve closed
3/6/2012	9:23:34 PM	PH3 valve closed
3/6/2012	9:23:34 PM	SiCl4 pre valve closed
3/6/2012	9:23:34 PM	SiCl4 post valve closed
3/6/2012	9:23:34 PM	Bypass valve closed
3/6/2012	9:23:34 PM	Bubbler valve closed
3/6/2012	9:23:34 PM	Main Vac valve opened
3/6/2012	9:23:34 PM	Helium MFC set to  0.000000
3/6/2012	9:23:34 PM	H2 MFC set to  0.000000
3/6/2012	9:23:34 PM	BCl3 MFC set to  0.000000
3/6/2012	9:23:34 PM	PH3 MFC set to  0.000000
3/6/2012	9:23:34 PM	SiCl4 MFC set to  0.000000
3/6/2012	9:23:34 PM	Bypass solenoid MFC set to  0.000000
3/6/2012	9:23:34 PM	Tube furnace set to 0
3/6/2012	9:23:35 PM	Run finished at 9:23 PM
3/6/2012	9:23:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
